| Customization: | Available |
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| CAS No.: | 4109-96-0 |
| Formula: | Sih2cl2 |
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Dichlorosilane (SiH2Cl2) is a colorless, highly reactive, and moisture-sensitive gas commonly used in semiconductor manufacturing, chemical vapor deposition (CVD), and silicon-based thin-film processes. It serves as a key precursor for high-purity silicon deposition and epitaxial growth in microelectronics. Due to its high reactivity, it must be handled with care in controlled environments.
Chemical Formula: SiH2Cl2
Molecular Weight: 101.02 g/mol
CAS Number: 4109-96-0
EINECS Number: 223-878-0
Boiling Point: 8.4°C (47.1°F)
Melting Point: -122°C (-187.6°F)
Density: 1.28 g/cm³ (liquid at 25°C)
Vapor Pressure: 36.7 kPa at 20°C
Solubility in Water: Reacts violently
Flammability: Flammable, decomposes in air
Reactivity: Hydrolyzes rapidly, forming hydrochloric acid (HCl)
Semiconductor Industry
Used in chemical vapor deposition (CVD) processes to deposit high-purity silicon layers.
Essential for epitaxial silicon growth in integrated circuits (ICs), microelectronics, and photovoltaic cells.
Key precursor for polysilicon film formation in transistor and display manufacturing.
Silicon-Based Coatings & Thin Films
Applied in plasma-enhanced CVD (PECVD) to produce protective and functional silicon coatings.
Used in manufacturing optical and solar-grade silicon materials.
Specialty Chemical Reactions
Acts as a chlorosilane precursor in producing other silicon-based compounds.
Utilized in chemical synthesis for advanced materials and coatings.
Available in high-pressure gas cylinders, bulk storage, and ISO tanks.
Offered in high-purity grades (99.999%) for semiconductor and electronic applications.
Requires strict moisture control during transportation and storage.
Globally shipped with high safety standards to prevent hydrolysis and accidental decomposition.
| Company |
| MAOTOOGAS EQUIPMENTS (SHANGHAI) CO.,LTD. specializes in the production and sales of mixed gas, high-purity gas, electronic gas, isotope gas and other gas products, as well as gas pipeline supporting engineering services! MAOTOOGAS gas mainly serves semiconductor, led, optical fiber, solar energy, petrochemical, biomedicine, University, scientific research, electric power, electronics, shipping, coal mine, automobile, medical, fire protection, aerospace, food, construction, smelting, fine chemical, processing and manufacturing industries. |
| 1. What's your product price? Because each gas price depends on market supply and demand, quantity, and purity, it is difficult to give a fixed price. If If you have any interest in any gas, please give your details and requirements. We can negotiate the most reasonable price. 2. What's the minimum order quantity? Different products have different minimum order quantity. Please don't hesitate to let me know your requirement. 3. What's the delivery time? If the cylinder needs to be customized, the delivery is about 35 days ex-work after receiving the deposit. That depends on the quantity. 4. How do I check the gas quality? Firstly, our cylinder will take a treatment (cleaning, drying, vacuum pumping, and replacement) before filling gas. In this way, the cylinder inside is clear and dry. Secondly, we will take tests on every treated cylinder to assure their inside purity. Thirdly, We will take a test for all of the gas after filling the cylinders. If the tested gas is not up to standard, we will produce it again and not release the faulty product to ex work. At last, we will supply you the gas testing qualified report . |
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